University of Illinois at Urbana-Champaign

Improving the Positional Accuracy of the Goniometer on the Philips CM Series TEM

Jim Pulokas

Research Programmer

Imaging Technology Group

Beckman Institute

22 July 1999

We have developed a method to improve the accuracy for absolute relocation of a target specimen using the goniometer on a Philips transmission electron microscope. We have achieved this by characterizing the performance of the Philips compustage, modeling its behavior and using this model to calculate the goniometer movements required for accurate target relocation. This resulted in a tenfold improvement in the accuracy of the goniometer.