Energy-Dispersive Spectroscopy Using the Environmental Scanning Electron Microscope

Scott Robinson

Senior Research Engineer

Imaging Technology Group

Beckman Institute

3 June 1999

A feature of the new environmental scanning electron microscope (ESEM) that we have not emphasized to date is its capability for performing elemental analysis using energy-dispersive spectroscopy (EDS). EDS (also called EDX, or EDXA, for energy-dispersive x-ray analysis) may be used to help characterize specimens by providing qualitative data on their elemental composition, and in some cases credible quantitative data may be obtained. In conjunction with other methodologies, such as atomic number contrast imaging through the use of the backscattered electron detector, EDS can add another dimension to the simple imaging capacity of the ESEM.