Clean Room Reflected Light Microscope

AxioScope A1

The Zeiss AxioScope A1 is configured to perform reflected light microscopy as well as reflected light differential-interference contrast (DIC) and reflected light dark field microscopy. Images may be acquired using a Zeiss AxioCam ICc3 color CCD camera. The microscope is used for individual process step inspection of MEMs devices such as microstamps or microfluidic devices, alignment of either multi layer photoresist or multiple polymer layer bonding, also final inspection and evaluation of devices.

Tables for the Zeiss Objectives can be found here.

A chart for immersion oil types can be found here.

ITG users may reserve time on the LM using the Clean Room Scope Calendar.

Manufacturer:	Carl Zeiss, Inc.
Equipment Model:	AxioScope A1
Features:	- High resolution color CCD - Reflected Bright Field - Reflected Dark Field - Reflected Polarized Light - Transmitted Bright Field - Zeiss Axiovision LE Software
Location:	B420B (Clean Room)
Phone:	(217) 265-0827
Contact Person:	Kathleen Motsegood Jon Ekman
Fees & Consumables:	See Microscopy Suite Fees
User Resources :	AxioVision LE Rel. 4.7 viewer software
Related Equipment:	Clean Room
Related Forums:
Related Technical Reports:
File Format:	Default file format is .ZVI Files can also be saved as .tif Image import: bmp, tif, jpg, gif, tga, png, j2k, jp2, mac, msp, ras, pct, eps, wmf, psd, img, cmp, zvi, lsm, czi Image export: bmp, jpg, tif, tga, png, psd, cmp, avi, lsm, mov, j2k, jp2, pcx, tga, wmf, pcf