University of Illinois at Urbana-Champaign

Clean Room

The BioMEMs Laboratory is a multi-user clean room within the ITG group of the Beckman Institute for Advanced Science and Technology. The BTC-Lab is dedicated to micro fabrication of devices, sensors and the direct patterning via photolithographic techniques. The laboratory is composed of a small clean room with basic photolithographic patterning capabilities and chemistry lab to aid in cell and micro fluidics studies. Research is conducted in a number of areas related to biological engineering, including: patterning of cells for signal transduction and controlled cellular function; micro to nano-fluidic transport of proteins; various types of spectroscopy of organic molecules in micro-flows; among other BioMEMs and sensors related research. ITG users need to reserve time to use the Clean Room.

Equipment available in the lab: - AxioScope A1 with AxioCam ICc3 color camera
- Class 500 clean room
- Cee 100 Programmable Spinner
- Kasper Contact Aligner
- March Plasmod
- UV block lighting
Location: room B420B
Phone: in hallway: (217) 265-0827
Contact Person: Kathleen Motsegood, Jon Ekman
Fees & Consumables: See fee page for charges related to using the ceanroom.