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Sputter Coater

Sputter CoaterDenton Desk II TSC turbo-pumped sputter coater, with rotating/tilting specimen holder and film thickness monitor. Standard gold/palladium target, with spare gold and platinum.

ITG users may reserve time on the Sputter Coater using the Sputter Coater calendar.

Manufacturer: Denton Vacuum
Equipment Model: Desk II TSC
Location: B650G
Contact Person: Scott Robinson
Contact Information: Microscopy Suite Staff:
Scott Robinson (217) 265-5071
Fees & Consumables: See Microscopy Suite Fees
Related Equipment: ESEM

The ITG is part of the Beckman Institute for Advanced Science and Technology at the University of Illinois.
Beckman Institute

University of Illinois at Urbana-Champaign Copyright 2005. All rights reserved. University of Illinois at Urbana-Champaign.
The Imaging Technology Group
405 North Mathews, Urbana IL 61801 USA
Phone: 217.244.0170    FAX: 217.244.6219    Email:  I T G