Enhanced Transisitor Lifetime
Through Deuterium Processing
Animation Produced by Members of the
Imaging Technology Group
Research by Joesph Lyding & Karl Hess

Click above to view a 14MB MPEG
About the Animation
A prime example of the type of output that can be produced in the VMIL, the 'Deuterium
Video' (as it has become commonly called) illustrates the effects of hydrogen passivation
on a layer of silicon. While only 1:18 in length, it took several people several weeks to
produce, using practically the full extent of the VMIL facilities.
The molecular model of silicon and silcon dioxide was built using Cerius2,
a molecular modeling/simulation program available on our SGI and AIX machines. This data
was then imported into Softimage 3D, a 3D
animation/modeling program. Importation was done using a utility called mol2soft, written by
former members of our staff, including Chris Trimble and Joe Lohmar.
About the Research
Joe Lyding and Karl Hess, both faculty members in the UIUC Department of Electrical and
Computer Engineering (ECE) and in the Beckman Institute's molecular and electronic
nanostructures main research area, publicly announced on February 14, 1996, a discovery
that can have a significant impact on the lifespan of silicon chips.
Their discovery involves a simple change in processing the chips. Instead of treating
them with hydrogen, as is traditionally done, Lyding and Hess used deuterium. Deuterium is
a stable, non-radioactive isotope of hydrogen and weighs about twice as much as ordinary
hydrogen. Where hydrogen molecules tend to get knocked off the silicon surface during an
electrical charge, breaking hydrogen-silicon bonds and decreasing performance, in the
tests performed by the Beckman Institute researchers, the deuterium stayed bonded.
Read more about the research involved in the Beckman News.