Image of the Week - 07 September 2004

Micrograsses on Silicon Substrate

The micrograsses in this ESEM image are over 200 micrometers long and 10 micrometers in diameter; the aspect ratio is about 20. The structures were formed using the DRIE process with a formula developed in our laboratory. The micrograss structure is to be used as a pre-concentrator in our MEMS gas sensor project.

Image Courtesy: Junghoon Yeom and Yanjun (David) Tang, Department of Chemical and Biomolecular Engineering

Contact: jungyeom@uiuc.edu, yjtang@uiuc.edu